Nb doped SrTiO3 (Nb-STO) buffer layers have been fabricated on LaAl03 (LAO) single crystal substrates by metalorganic deposition (MOD) using triethanol amin for YBCO films. The gel coated substrates were dried on hot plate at 300°C for 5 min in air and subsequently annealed at 1150°C for 10 min under 4% H2-Ar gas flow. These films were characterized by XRD, pole figure XRD and SEM. It was found that highly textured, crack-free, smooth, homogenous and dense Nb-STO films with a strong (100) orientation on LAO substrate especially when using triethanol amin to improve the wettability of the coating solution. YBCO films have been deposited on the Nb-STO buffered LAO substrates by pulsed laser deposition (PLD). The obtained results are presented.