© 2021, The Editor(s) (if applicable) and The Author(s), under exclusive license to Springer Nature Switzerland AG.The aim of this study is to investigate the Fuzzy Axiomatic Design Method of MEMS (Micro Electro-Mechanical System) based sensors in the field of nanoscience, which is specific to the different parameters (sound, vibration, etc.) of industrial machinery etc. in the scope of Industry 4.0 predictive maintenance. Within the scope of the study, which is the continuation of the ongoing project, it is aimed to advance the literature search in a special R & D center, to carry out university-industry cooperation studies, and to conduct the tests of the appropriate MEMS based sensor in the predictive maintenance processes of the companies. In order to determine the most suitable method (lithography, etc.) used in the production of sensor based sensors and shaping their design/modeling, experimental studies will be carried out. After the modeling/patterning process, the dimensional and similar parameters of the sensor base will be optimized and the most suitable design will be selected by the axiomatic design method. Finally, it will be evaluated whether the selections made for MEMS based sensors are suitable for NEMS (Nano Electromechanical System) based sensors at nanoscale.